CONTRACT AWARD NOTICE: Optical film stress measurement tool
CONTRACT AWARD NOTICE: Optical film stress measurement tool This is a contract award notice under the Finnish Act on Public Procurement and Concession Contracts, setting out the outcome of the procurement. THE OBJECT OF THE TENDER PROCESS The object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, programmable automatic wafer scanning system, a…
- Ostaja
- VTT Technical Research Centre of Finland Ltd
- Julkaistu
- 2026-10-23
- Arvo
- 660 000 EUR
- Suorituspaikka
- Uusimaa
- Ilmoitus
- 60034
Voittajat ja hankinnan osat
CONTRACT AWARD NOTICE: Optical film stress measurement tool
This is a contract award notice under the Finnish Act on Public Procurement and Concession Contracts, setting out the outcome of the procurement. THE OBJECT OF THE TENDER PROCESS The object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, program…
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