Defect inspection system
Defect inspection system VTT is looking to acquire an automated defect inspection tool for 200 mm and 300 mm patterned wafers. The tool will enable rapid tracking of defects that appear during the manufacturing process of functional devices (in-line and end-of-line in the Front-end process). The tool must be capable of detecting particles, voids, cracks, scratches, pits, bumps, and hazes in the pattern. The materials of the patterns that the machine must be able to analyze are silicon oxides and nitrides, polysilicon, metals, and photoresist. The object of the tender process and the technica…
- Ostaja
- VTT Technical Research Centre of Finland Ltd
- Julkaistu
- 2026-10-14
- Arvo
- 1 190 000 EUR
- Suorituspaikka
- Uusimaa
- Ilmoitus
- 59372
Voittajat ja hankinnan osat
Defect inspection system
VTT is looking to acquire an automated defect inspection tool for 200 mm and 300 mm patterned wafers. The tool will enable rapid tracking of defects that appear during the manufacturing process of functional devices (in-line and end-of-line in the Front-end process). The tool must be capable of detecting particles, voids, cracks, scratches, pits, bumps, and hazes in the pattern. The materials of the patterns that the machine must be able to analyze are silicon oxides and nitrides, polysilicon, m…
- Confovis GmbH (HRB 504262) – 1 190 000 €