Ion beam trimmer
Ion beam trimmer The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.,
- Ostaja
- VTT Technical Research Centre of Finland Ltd
- Julkaistu
- 2026-09-03
- Arvo
- 1 256 300 EUR
- Suorituspaikka
- Uusimaa
- Ilmoitus
- 56153
Voittajat ja hankinnan osat
Ion beam trimmer
The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.
- Sales Department (DE288142276) – 1 256 300 €