Picosecond ultrasonics film thickness measurement tool
Picosecond ultrasonics film thickness measurement tool Cassette-to-cassette measurement system using picosecond ultrasonics for materials characterization in semiconductor processes, enabling metal thickness metrology, implant monitoring, and thermal conductivity characterization.,
- Ostaja
- TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Julkaistu
- 2026-08-04
- Arvo
- 1 750 000 EUR
- Suorituspaikka
- Uusimaa
- Ilmoitus
- 54095
Voittajat ja hankinnan osat
Picosecond ultrasonics film thickness measurement tool
Cassette-to-cassette measurement system using picosecond ultrasonics for materials characterization in semiconductor processes, enabling metal thickness metrology, implant monitoring, and thermal conductivity characterization.
- Onto Innovation (07-630-3858) – 1 750 000 €