200 mm coating and developing track tool
200 mm coating and developing track tool THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of…
- Ostaja
- VTT Technical Research Centre of Finland Ltd
- Julkaistu
- 2025-10-10
- Arvo
- 1 172 117 EUR
- Suorituspaikka
- Uusimaa
- Ilmoitus
- 31672
Voittajat ja hankinnan osat
200 mm coating and developing track tool
THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated …
- EV Group Europe and Asia Pacific GmbH (ATU64462708) – 1 172 117 €